Research Facilities

Scanning Electron Microscope (SEM) with Energy Dispersive X-ray spectrometer (EDX)


SEM-Hitachi Tabletop Microscope TM3030

Magnification: 15 to 30,000x (digital zoom: 2x, 4x)
Observation condition: 5kV/15kV/EDS
Observation mode: Conductor; Standard Mode; Charge-up reduction mode
Image mode: COMPO/Shadow 1/Shadow 2/TOPO
Maximum sample size: 70mm in diameter
Maximum sample height: 50mm
Electron gun: Pre-centered cartridge filament
Detector: High-sensitivity semiconductor backscattered electron detector
Recording pixels: 1280x960 pixels(max)/640x480 pixels
Data display: Micron marker, micron value, date and time, image number, image mode, observation condition, distance, observation mode

Energy Dispersive X-ray spectrometer (EDS)
EDS System for Hitachi Tabletop Microscope TM3030 QUANTAX 70

Analyzing modes: Spot, Line, Mapping
Image size: Large: 1024 x 768 Pixel, Normal: 640 x 480 Pixel, Small: 320 x 240 Pixel
Element identification: both “Auto mode” and “Advanced Element Identification” available
Quantification results available as: net counts, mass percent, mass percent (normalized), atomic percent