Research Facilities
Auger Electron Spectroscopy (AES) – Modular PHY system
The Auger electron spectrometer (PHI Model – 3017) has the following specifications:
- Electron energy analyzer:
Type : Single-pass Cylindrical Mirror Analyzer (CMA)
Electron multiplier : Cu-Be Channeltron
Energy range : to 3200 eV
Energy resolution : 0.6 %
Beam energy : 0.1 ~ 5 KeV
Electron gun type : Electrostatic, fixed beam
Beam current : > 50 µA
- Electron gun control :
Beam voltage range control : 0 ~ 5000 V
Emission current range and control : 0 ~ 6 mA
- Analyzer Control :
Energy range : 0 ~ 3200 eV
Resolution : 50 meV/step
Energy sweep rate : 2msec/eV